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Home Products Micro Lens Arrays (MLA) and Assemblies Homogenizers

Homogenizers

Homogenizers can handle a wide range of field geometries and beam shapes - top hat, rectangular, square and lines - typical full angle from 0.20 to 11.21 deg

Homogeneity up to the technical limits (up to 1% non-uniformity)

High NA, high fill factor and retention of polarization

Optical efficiency up to 90 % help to cut the cost of expensive laser energy

Manufactured from high-quality materials, e.g., fused silica, CaF2, suitable for many different laser sources (e.g., excimer laser, solid-state laser, diode laser)

Customized freeform surfaces with highest precision on different wafer sizes (up to 300 mm)

 光場勻化器

Key Specifications

Single Sided Homogenizer ZLA001111 * 12.0 x 12.0 x 2.0 mm 69.56 mm Uncoated 0.41° 31.3 mm 0.5 mm
Double Sided Homogenizer ZLA000485 * 12.0 x 12.0 x 2.0 mm 69.56 mm Uncoated 0.41° 31.3 mm 0.5 mm
Single Sided Homogenizer ZLA000233 * 12.0 x 12.0 x 2.0 mm 4.78 mm Uncoated 6.00° 2.15 mm 0.5 mm
Double Sided Homogenizer ZLA000481 12.0 x 12.0 x 2.0 mm 4.78 mm Uncoated 6.00° 2.15 mm 0.5 mm
Single Sided Homogenizer ZLA000239 12.0 x 12.0 x 2.0 mm 12.22 mm Uncoated 2.34° 5.5 mm 0.5 mm
Double Sided Homogenizer ZLA000240 * 12.0 x 12.0 x 2.0 mm 12.22 mm Uncoated 2.34° 5.5 mm 0.5 mm
Single Sided Homogenizer ZLA000479 12.0 x 12.0 x 2.0 mm 7.78 mm Uncoated 3.68° 3.5 mm 0.5 mm
Double Sided Homogenizer ZLA000238 * 12.0 x 12.0 x 2.0 mm 7.78 mm Uncoated 3.68° 3.5 mm 0.5 mm
Single Sided Homogenizer ZLA000601 * 12.0 x 12.0 x 2.0 mm 31.11 mm Uncoated 0.92° 14 mm 0.5 mm
Double Sided Homogenizer ZLA000234 * 12.0 x 12.0 x 2.0 mm 31.11 mm Uncoated 0.92° 14 mm 0.5 mm
Single Sided Homogenizer ZLA001110 * 12.0 x 12.0 x 2.0 mm 46.67 mm Uncoated 0.61° 21 mm 0.5 mm
Double Sided Homogenizer ZLA000237 * 12.0 x 12.0 x 2.0 mm 46.67 mm Uncoated 0.61° 21 mm 0.5 mm
Single Sided Homogenizer ZLA001109 20.0 x 20.0 x 2.0 mm 173.33 mm Uncoated 0.26° 78 mm 0.8 mm
Double Sided Homogenizer ZLA000230 * 20.0 x 20.0 x 2.0 mm 173.33 mm Uncoated 0.26° 78 mm 0.8 mm
Single Sided Homogenizer ZLA001108 * 20.0 x 20.0 x 2.0 mm 106.67 mm Uncoated 0.43° 48 mm 0.8 mm
Double Sided Homogenizer ZLA000229 * 20.0 x 20.0 x 2.0 mm 106.67 mm Uncoated 0.43° 48 mm 0.8 mm
Single Sided Homogenizer ZLA001107 * 20.0 x 20.0 x 2.0 mm 233.33 mm Uncoated 0.20° 105 mm 0.8 mm
Double Sided Homogenizer ZLA000511 * 20.0 x 20.0 x 2.0 mm 233.33 mm Uncoated 0.20° 105 mm 0.8 mm
Single Sided Homogenizer ZLA001106 * 20.0 x 20.0 x 2.0 mm 9.67 mm Uncoated 4.74° 4.35 mm 0.8 mm
Double Sided Homogenizer ZLA000509 * 20.0 x 20.0 x 2.0 mm 9.67 mm Uncoated 4.74° 4.35 mm 0.8 mm
Single Sided Homogenizer ZLA001105 * 20.0 x 20.0 x 2.0 mm 19.33 mm Uncoated 2.37° 8.7 mm 0.8 mm
Double Sided Homogenizer ZLA000243 * 20.0 x 20.0 x 2.0 mm 19.33 mm Uncoated 2.37° 8.7 mm 0.8 mm
Single Sided Homogenizer ZLA001104 20.0 x 20.0 x 2.0 mm 24.67 mm Uncoated 1.86° 11.1 mm 0.8 mm
Double Sided Homogenizer ZLA000507 20.0 x 20.0 x 2.0 mm 24.67 mm Uncoated 1.86° 11.1 mm 0.8 mm
Single Sided Homogenizer ZLA000487 * 20.0 x 20.0 x 2.0 mm 54.22 mm Uncoated 0.85° 24.4 mm 0.8 mm
Double Sided Homogenizer ZLA000488 * 20.0 x 20.0 x 2.0 mm 54.22 mm Uncoated 0.85° 24.4 mm 0.8 mm
Single Sided Homogenizer ZLA001103 * 20.0 x 20.0 x 2.0 mm 37.11 mm Uncoated 1.24° 16.7 mm 0.8 mm
Double Sided Homogenizer ZLA000486 * 20.0 x 20.0 x 2.0 mm 37.11 mm Uncoated 1.24° 16.7 mm 0.8 mm
Single Sided Homogenizer ZLA001102 * 35.0 x 35.0 x 2.0 mm 6.64 mm Uncoated 11.21° 2.99 mm 1.3 mm
Double Sided Homogenizer ZLA000218 * 35.0 x 35.0 x 2.0 mm 6.64 mm Uncoated 11.21° 2.99 mm 1.3 mm
Single Sided Homogenizer ZLA000796 * 35.0 x 35.0 x 2.0 mm 9.78 mm Uncoated 7.62° 4.4 mm 1.3 mm
Double Sided Homogenizer ZLA000800 * 35.0 x 35.0 x 2.0 mm 9.78 mm Uncoated 7.62° 4.4 mm 1.3 mm
Single Sided Homogenizer ZLA000791 * 35.0 x 35.0 x 2.0 mm 18.67 mm Uncoated 3.99° 8.4 mm 1.3 mm
Double Sided Homogenizer ZLA000794 * 35.0 x 35.0 x 2.0 mm 18.67 mm Uncoated 3.99° 8.4 mm 1.3 mm
Single Sided Homogenizer ZLA001101 * 35.0 x 35.0 x 2.0 mm -111.11 mm Uncoated 0.67° -50 mm 1.3 mm
Double Sided Homogenizer ZLA000787 * 35.0 x 35.0 x 2.0 mm -111.11 mm Uncoated 0.67° -50 mm 1.3 mm
Single Sided Homogenizer ZLA001689 * 35.0 x 35.0 x 2.0 mm 37.78 mm Uncoated 1.97° 17 mm 1.3 mm
Double Sided Homogenizer ZLA000788 * 35.0 x 35.0 x 2.0 mm 37.78 mm Uncoated 1.97° 17 mm 1.3 mm
Single Sided Homogenizer ZLA000772 35.0 x 35.0 x 2.0 mm 14.44 mm Uncoated 5.16° 6.5 mm 1.3 mm
Double Sided Homogenizer ZLA001687 * 35.0 x 35.0 x 2.0 mm 14.44 mm Uncoated 5.16° 6.5 mm 1.3 mm
Single Sided Homogenizer ZLA001688 * 35.0 x 35.0 x 2.0 mm 27.78 mm Uncoated 2.68° 12.5 mm 1.3 mm
Double Sided Homogenizer ZLA000781 35.0 x 35.0 x 2.0 mm 27.78 mm Uncoated 2.68° 12.5 mm 1.3 mm
Single Sided Homogenizer ZLA000744 * 35.0 x 35.0 x 2.0 mm 55.56 mm Uncoated 1.34° 25 mm 1.3 mm
Single Sided Homogenizer ZLA000742 * 35.0 x 35.0 x 2.0 mm 111.11 mm Uncoated 0.67° 50 mm 1.3 mm
Double Sided Homogenizer ZLA000743 * 35.0 x 35.0 x 2.0 mm 111.11 mm Uncoated 0.67° 50 mm 1.3 mm
* Typical customization of products. Longer lead time may apply to custom products.
Didn't find any products that meet your requirements? Feel free to contact us for further technical support!

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